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Magnetron sputtering

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Leader  00000cz a2200037n 45 0
001  fst01894440
003  OCoLC
005  20201106120917.0
008  131105n| anznnbabn || ana d
0167 ‎‡a fst01894440‏ ‎‡2 OCoLC‏
0247 ‎‡a http://id.worldcat.org/fast/1894440‏ ‎‡2 uri‏
040 ‎‡a OCoLC‏ ‎‡b eng‏ ‎‡c OCoLC‏ ‎‡f fast‏
053 0 ‎‡a QC176.8.M34‏
150 ‎‡a Magnetron sputtering‏
550 ‎‡w g‏ ‎‡a Sputtering (Physics)‏ ‎‡0 (OCoLC)fst01131025‏
688 ‎‡a LC (2022) Subject Usage: 0‏
688 ‎‡a WC (2022) Subject Usage: 44‏
750 0 ‎‡a Magnetron sputtering‏ ‎‡0 (DLC)sh2013000427‏
750 4 ‎‡a Sputter deposition‏ ‎‡4 RM‏ ‎‡0 http://en.wikipedia.org/wiki/Sputter_deposition‏ ‎‡0 https://www.wikidata.org/wiki/Q847609‏

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